Real footage
Prototype 1.0 · built and working
The lithograph
An enclosed desktop tool: DMD projection head, 440 nm LED, closed-loop XY stage on optical scales. Results on real wafers, specifications, applications.
DESKTOP · MASKLESS · DIRECT FROM GDSII
Desktop Maskless Lithography
Photolithography straight from a layout file. No photomasks, no mask aligner, no waiting — a design change is a file change.
Prototype 1.0 is built and working: it exposes real wafers and runs software written in-house. Prototype 2.0, a modular motion platform with lithography as its first instrument, now has manufactured and trial-assembled mechanical components. I'm looking for a manufacturing partner and investor.
Photograph · a die array exposed on Prototype 1.0
GDSII
native input · no photomasks
1 869 fields
stitched in one 20 × 20 mm job
97–98 %
illumination uniformity, calibrated
440 nm
LED source · no laser
The work
One machine, four parts
A working lithograph, the platform it grows into, the software that drives both, and the calibration that lets ordinary parts reach sub-micron placement.
Real footage
Machined hardware
Prototype 2.0 · mechanical pre-assembly
The motion platform
Three copies of one sub-micron linear module make an XYZ gantry. Lithography is its first instrument; other optics bolt to the same base.
Written in-house
The software
Runs the job from GDSII to wafer: tiling, die arrays, contrast autofocus, a substrate height map and a live wafer map.
Both prototypes
The calibration
A camera in the wafer plane measures geometry, dose and stitching, and the software cancels them: illumination flat to within 2–3 %.
Who builds it
Ilia Sidorov, R&D engineer
Optics, mechanics, electronics and software of this machine were designed, built and brought to working condition by one person. Before it: four years taking scientific instruments from prototype to serial production at Abisense (fluorescence tomography), and optical subsystems for the Nanobiotechnology Laboratory at MIPT.
One engineer is a risk for a partner, so the work is built to be handed over: industrial off-the-shelf components (Delta servo drives on CANopen, a TI DMD, optical scales), parts designed for contract manufacturing, full documentation and in-house software.
Where it stands
Status and limits
Said plainly, so nobody has to dig for it.
- Built and working: Prototype 1.0single-layer exposure on real wafers, stitched across the whole wafer, with in-house software and calibration
- Not yet: layer-to-layer alignmentthe rotary chuck and the alignment workflow are in development; today it is expose, develop, done
- Mechanical pre-assembly: Prototype 2.0components manufactured and trial-assembled; system specifications remain design targets
- Available nowdemonstrations and sample exposures by arrangement
- What a partner bringsproduction, supply chain and market access; deal structure and investment size are open
Partnership
Looking for a manufacturing partner and investor
On the table: a working Prototype 1.0, the Prototype 2.0 design, full documentation and in-house software. A partner brings production, supply chain and market access; deal structure and investment size are open. Demonstrations and sample exposures by arrangement.